Abstract
A cantilever-based microring laser structure was proposed for easily integrating III-V active layer into mechanically stretchable substrates. Local strain gauges were demonstrated by embedding cantilever-based microring lasers in a deformable polymer substrate. The characterizations of microscale local strain gauges had been studied from both simulated and experimental results. The lasing wavelength of strain gauges was blue-shift and linear tuned by stretching the flexible substrate. Gauge factor being ∼11.5 nm per stretching unit was obtained for a cantilever-based microring laser with structural parameters R=1.25 μm, W1=450 nm and W2=240 nm. Such microring lasers embedded in a flexible substrate are supposed to function not only as strain gauges for monitoring the micro- or nano-structured deformation, but also tunable light sources for photonic integrated circuits.
Highlights
Semiconductor microrings are presently attracting increasing attentions as one of most promising components of photonic integrated circuits over the past years
A chip-scale compact optical curvature sensor consisting of InGaAsP microdisk laser on a bendable polydimethylsiloxane (PDMS) substrate was demonstrated in 2009.19,20 In 2011, Lu et al demonstrated a one-dimensional (1-D) photonic crystal (PhC) nanocavity laser directly transferred onto a PDMS substrate with obtained bending radius to 2.5 mm.[21]
In 2015, Shih et al illustrated an ultracompact tunable laser with InGaAsP photonic crystal nanorods embedded in a PDMS substrate and lasing wavelength can be linearly fine-tuned with ∼50 nm range.[24]
Summary
Semiconductor microrings are presently attracting increasing attentions as one of most promising components of photonic integrated circuits over the past years. Cantilever-based microring lasers embedded in a deformable substrate for local strain gauges
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