Abstract
Cantilever resonance is detected by a tunneling current between a scanning tunneling microscope probe and an Au–Ti-coated SiO2 cantilever on a Si substrate under the application of an RF signal from a Si back electrode under the SiO2 layer. The cantilever resonance frequency obtained by tunneling current measurements corresponds well with those obtained by displacement current measurements between a cantilever array and the Si back electrode. The tunneling current at the resonant condition depended on the power of the RF signal. The vibration amplitude of the cantilever was evaluated to be of the order of 1–3 Å by the tunneling current.
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