Canny Algorithm Enabling Precise Offline Line Edge Roughness Acquisition in High-Resolution Lithography.

Abstract

The line edge roughness (LER) is one of the most critical indicators of photoresist imaging performance, and its measurement using a reliable method is of great significance for lithography. However, most studies only investigate photoresist resolution and sensitivity because LER measurements require an expensive and not widely available critical dimension scanning electron microscopy (SEM) technology; thus, the imaging performance of photoresist has not been adequately evaluated. Here, we report an image processing software developed for offline calculation of LER that can analyze lithographic patterns with resolutions up to ∼15 nm. This software can effectively process all graphic files obtained from commonly used SEM machines by utilizing the adjustable double threshold. To realize the effective detection of high-resolution patterns in advanced lithography, we used SEM images generated from extreme ultraviolet and electron beam lithography to develop and validate the software's graphic recognition algorithm. This image processing software can process typical SEM images and produce reliable LER in an efficient and user-friendly manner, constituting a powerful tool for promoting the development of high-performance photoresist materials.