Abstract
Small tilting of the epilayer lattice planes is commonly observed in lattice-mismatched epilayers grown on vicinal substrates. This tilt is commonly believed to be an alternative strain-relieving mechanism to the formation of misfit dislocations. It is shown that this is not likely for (100) heterosystems, because the introduction of those dislocations is favorable which relax misfit rather than those which induce tilt. The model shows good agreement with experimental observations.
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