Abstract
The medium-term storage stability and reproducibility defined in the course of calibration of the scale factor of scanning electron microscopes are established with the use of an MShPS-2.0K measure. Conclusions are drawn to the effect that the dependence of the scale factor on the working distance may lead to some scatter of the measurement results and that direct comparison of the dimensions of the measured subject and a reference object obtained with the same parameters of the microscope is required to increase the measurement accuracy.
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