Abstract
We show that the accuracy of energy-dispersive X-ray spectroscopy can be improved by analysing and comparing multiple lines from the same element. For each line, an effective k-factor can be defined that varies as a function of the intensity ratio of multiple lines (e.g. K/L) from the same element. This basically performs an internal self-consistency check in the quantification using differently absorbed X-ray lines, which is in principle equivalent to an absorption correction as a function of specimen thickness but has the practical advantage that the specimen thickness itself does not actually need to be measured.
Highlights
Energy-dispersive X-ray spectroscopy (EDXS) in a transmission electron microscope (TEM) offers high spatial resolution but usually suffers from both poor counting statistics due to small collection angles and quantification problems due to self-absorption in thin foil specimens analysed under small take-off angles
We have developed a method that takes into account all available X-ray lines (K, L etc.) within spectra, thereby performing a self-consistent absorption correction for e.g. Kand L-lines
We demonstrate this in the following for the SiGe system as an example the results of which have already been applied to quantify the chemical composition of very thin Si1-xGex layers [14]
Summary
This content has been downloaded from IOPscience. Please scroll down to see the full text. Ser. 471 012031 (http://iopscience.iop.org/1742-6596/471/1/012031) View the table of contents for this issue, or go to the journal homepage for more. Download details: IP Address: 137.205.202.97 This content was downloaded on 31/01/2014 at 15:05 Please note that terms and conditions apply
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