Abstract
The numerical aperture (NA) of a microscope objective can affect the measurement of surface height profiles. Large NA objectives measure height values smaller than the actual values. An experiment to calibrate these effects on objectives with NAs of 0.1 to 0.95 is described using four traceable step height standards and a computer-controlled interferometric optical profiler utilizing phase-measurement interferometry techniques. The measured NA scaling factors have good agreement with a theory developed by Ingelstam and indicate that the effective NA rather than the nominal NA is the important quantity. NA scaling factors are determined to an uncertainty of ±1% for NAs of 0.5 or less and ±2% for NAs of 0.9 or greater.
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