Calibration of Scanning Electron Microscopes over a Wide Range of Magnifications

Abstract

A new method is proposed for calibrating scanning electron microscopes (SEM) with magnification in the 10–50000× range using an end gauge and an auxiliary structure. Use of a certified end gauge ensures traceability of the calibration results to the primary standard for the meter. The relative expanded uncertainty of measurements on an S-4800 SEM at magnifications of 1000, 10000, and 50000× is less than 0.14%.