Calibration for the sensitivity of multi-beam angle sensor using cylindrical plano-convex lens

Abstract

A highly sensitive and compact multi-beam angle sensor (MBAS), which utilizes the principle of operation of an autocollimator, was developed to detect the differential of the local slope components (angle difference) of a point on the mirror surface and using Fourier series, we can obtain the profile data from the angle difference. In order to investigate the application of the MBAS for high precision aspheric surface measurements, two types of calibration methods using plane mirror and cylindrical plano-convex lens has been proposed to measure the sensitivity of the MBAS. The calibration data analysis results using plane mirror agree well with the measurement results of the cylindrical plano-convex lens data. Comparison of the two methods confirms that the second method (using cylindrical plano-convex lens) is more adapted for measurement with ultra high level of uncertainty. Further, the second method is simple, corresponding to a direct calculate in the sensitive parameters aiming to minimize the cost.