Abstract
In this paper, an accurate calibration-based phase-shifting measurement technique for measuring the absolute 3D surface profiles is presented, in which the system distortions for each detection location are calibrated individually. Thus, this approach offers higher accuracy than that of conventional global system model-based calibration technique. By comparing the experimental results from this technique with the data from Zeiss Universal Precision Measuring Center (Model UPMC 550), it is found that the absolute measurement accuracy for a bowl size object (about 160 mm in diameter and 40 mm in depth) is about 5 μm. This experimental result proves that, indeed, this calibration-based phase-shifting measurement technique has a good enough accuracy for precise engineering surface (such as gear gauge surface) measurement.
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