Abstract

Due to the manufacturing technique, some kinds of CCD, such as the back illuminated CCD, have the problem of spectral response nonuniformity. The near infrared light passing through the substrate and gates and is reflected back into the substrate for a second pass resulting in increased response. For the Fourier transform imaging spectrometer, it adds stripe pattern error to the interferogram and distorts the reconstructed spectrum. The nonuniform response is wavelength dependent due to changes in reflectivity of metal and the cavity formed by silicon and metal with transparent dielectric, so it adds difficulty to the correction of the error of the reconstructed spectrum. In order to reduce the error of the reconstructed spectrum, in this paper, a calibration method and a correction method to correct the error caused by the CCD spectral response nonuniformity was developed, basing on analysis of the property of the CCD spectral response nonuniformity. Firstly, a calibrated monochromater was used to measure the CCD spectral response nonuniformity and the property and affect of the CCD spectral response nonuniformity were analyzed. Method to correct the error of the reconstructed spectrum caused by the stripe pattern error was developed. Secondly, to calibrate the CCD spectral response nonuniformity, the spectral response coefficient and the spatial response nonuniformity coefficient was measured and computed. Finally, we took data with a Fourier transform imaging spectrometer, and got the correction results of the reconstructed spectrums. The results showed that the distortion of recovered spectrum was evidently reduced and the effect of the calibration and correction method was proved.

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