Abstract

A new method for calculation of recoil-induced ionization distributions in solids bombarded by ions is presented. The method is based on a separation of the total ionization distribution into two components, one originating from the primary interaction between the incident ions and target electrons and one due to the interaction of recoiling target atoms with the electrons. The latter contributions, the so-called recoiled induced distribution, is extracted by taking the difference between the total and the primary distribution.Results from explicit calculations are shown for five different ion-target combinations in the energy range of 10 to 500 keV. A velocity proportional electronic stopping cross section is assumed and for each ion-target combination results are given for three different proportional constants. The method is shown to require a relatively small computational effort compared with more conventional methods for determination of energy deposition distributions.Classification: Radiation Damage and other irradiation effects (6180), Ions (6180J).

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