Abstract
This article describes an electrical network analysis (ENA) method to calculate the pressure distribution of a vacuum system in a molecular flow regime. The vacuum system was modeled using electrical components. For an accurate analysis, a complexly combined pipe model, excluding entrance conductance, was employed and the pressure distribution was simulated using ENA. A vacuum system comprising three vacuum pumps was used for simplicity. In addition, the ENA results were compared with results from finite element analysis (FEA) and experimental measurements. The pressure distribution profiles estimated from ENA, performed using the LTSpice IV software, were in agreement with FEA and experimental results.
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