Calculation of oxide sputter yields

Abstract

An existing semi-empirical model to calculate the compound sputter yields is used to fit a large set of literature data on oxide sputter yields which consists of data for 21 different materials, and 65 datasets. The dedicated fitting procedure enables to link the surface binding energy of the metal and oxygen atoms with the oxide cohesive energy. This approach resolves a long standing problem in the research community on the accurate prediction of oxide sputter yields.