Abstract
An existing semi-empirical model to calculate the compound sputter yields is used to fit a large set of literature data on oxide sputter yields which consists of data for 21 different materials, and 65 datasets. The dedicated fitting procedure enables to link the surface binding energy of the metal and oxygen atoms with the oxide cohesive energy. This approach resolves a long standing problem in the research community on the accurate prediction of oxide sputter yields.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
