Abstract
The Monte Carlo simulation of transport of incident ions and recoiling target atoms is combined with the semiempirical theory of ion-induced kinetic electron emission (KEE) for calculating the incident angle dependence of the KEE yields. The calculation was made for light and heavy ion impact on Al in the energy range from 100 eV to 1 MeV. The present results are consistent with the experimental data and have revealed the origin of the deviation from the inverse cosine law, which corresponds to the contributions from backscattering ions and recoiling target atoms.
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