Calculation of Feasibility of Grazing-Incidence X-Ray Fluorescence as a Method for Holographic Analysis

Abstract

Grazing incidence X-ray fluorescence (GIXF) was used to obtain information on composition as a function of depth. Glancing-angular dependence of the fluorescence intensity from a layered sample typically shows Kiessing fringe similar to the X-ray reflectivity curves, and it can be explained by theory of the atomic resolution X-ray holography, which is recently developed structural analysis method, where fluorescence intensities are measured as a function of direction of a crystal sample. In the GIXF, X-rays directly reaching at a layer emitting fluorescence are regarded as reference waves in holography, and X-rays singly reflected at interfaces act as object waves. Therefore, the angular dependence of fluorescence intensity is considered to be a hologram. The aim of the present work is the real space reconstruction from the angular dependence of the fluorescence intensity obtained by the calculation. Here, I made a multilayer model whose top layer was monatomic, and calculated the angular dependence of the fluorescence intensity from the top layer. The calculated pattern showed holographic oscillation. In the Fourier transform of the oscillation, there exists peaks corresponding to the depths of the interfaces in the multilayer, revealing that the present technique can provide film structure information without a priori knowledge.