Abstract
Electron probe microanalysis (EPMA) under grazing-exit conditions allows us to perform microscopic surface analysis, thin-film analysis and particle analysis. To evaluate the thickness and density of thin-films, it is necessary to calculate X-ray intensities as a function of the exit angle. In this paper, we propose a procedure to calculate X-ray intensities as a function of grazing-exit angle. Monte Carlo simulation is used to determine the depth distribution of the electron-induced X-ray production and a multilayer model is applied to include the grazing emission process. The exit angle resolved curves, calculated for Ni thin films, were compared with experimental curves. A good agreement between the experimental plots and the calculated curves indicates that the proposed computational approach can be applied successfully to the calculation of EPMA intensities. Appling this calculation, the lateral resolution of EPMA was also evaluated at different take-off angles. It was suggested that the lateral resolution would be improved under grazing-exit conditions. [DOI: 10.1380/ejssnt.2003.111]
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
