Abstract

The application areas of island thin films are considered, and the relevance of their application is presented. The choice of the method for formation island thin films and nanostructures is justified. A design of the thermal evaporation module is proposed and its documentation is developed. The use of it will allow to form continuous and island coatings. Variants for placing the module in the laboratory equipment - MVTU-11-1MS are considered. The analysis of the evaporator configurations was carried out and the type of evaporator – «tape» evaporator, was selected. The necessary calculations are presented: evaporator resistance (2,31 mOm) and thermal calculation (1200 K, 20), – this contributed the design of the module and the materials selection of its components.

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