Abstract
An experimental setup was established for <i>in situ</i> transmission and laser induced fluorescence (LIF) measurements of CaF<sub>2</sub> at 193 nm laser irradiation. The known rapid damage process in CaF<sub>2</sub> upon ArF laser irradiation is shown to terminate for all tested samples within 3×10<sup>4</sup> laser pulses for the applied fluences. Furthermore, it is demonstrated that for typical application values the fluence dependent transmission (FDT) at the end of the rapid damage process is independent of the irradiation history and determined by the specific crystal quality. From the lifetimes and signal strengths of different present fluorescence bands the excitation and recording conditions for LIF investigations are derived. The results of laser induced fluorescence measurements at 193 nm excitation make evident that certain impurities or defects are responsible for the different transmission properties even of high purity CaF<sub>2</sub> crystals. Comparing transmission and LIF data a quantitative correlation was found between selected emission bands and ArF laser stability of CaF<sub>2</sub> material.
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