Abstract
Abstract Low temperature co-fired ceramic (LTCC) materials based on CaF2–AlF3–SiO2 oxyfluoride glass-ceramics were prepared. The sintering behaviors, phase transition, microstructures, and the dielectric properties of the glass-ceramics, as well as their compatibility with Ag electrode were investigated systematically. It was revealed that the oxyfluoride glass-ceramics could be sintered at 800–825 °C. Moreover, as-prepared glass-ceramics exhibited low dielectric constant (5.93–4.93), low dielectric loss ( 150 MPa), proper thermal expansion coefficient (8.4–6.0 ppm/°C) and good sintering compatibility with silver electrode, which provided promising candidates for LTCC application.
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