Abstract
Abstract Cadmium-tin oxide thin films were prepared by d.c. reactive sputtering from CdSn alloy targets. The electrical and optical properties of these films were found to depend both on the oxygen concentration in the ArO 2 atmosphere during deposition and on the composition of the target. High transparency of these films in the visible region (80% average transmission), high infra-red reflection and high conductivity (1–50 Ω/sq sheet resistance) are exploited for optoelectronic and solar energy conversion devices (e.g. the reflective coatings, heat mirrors and the electrodes in electrochromic cells (E. Leja, K. Marszalek and T. Stapinski, Acta phys. polon. A67 , 467 (1985)).
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