CAD systems for VLSI in Japan : Tsuneta Sudo, Tatsuo Ohtsuki and Satoshi Goto. Proc. IEEE71 (1), 129 (1983)

Abstract

We report on an AFM-array concept (“Millipede”) for data storage of potentially ultrahigh density, terabit capacity, and high data rate. Thermomechanical writing and reading in very thin polymer films is used to store and sense 30–40-nm-sized bits with similar pitch size in very thin layers of PMMA, resulting in 400–500 Gbit/in2 storage densities. Data rates of several hundred Mbit/s are envisioned by operating very large (32×32) 2D AFM arrays in parallel. We have successfully batch-fabricated first all-silicon 5×5 and 32×32 AFM cantilever array chips. They constitute a major step of the Millipede concept towards terabit storage systems with small form factor and high data rates. Our 32×32 array chip is the first VLSI-NEMS (Nano ElectroMechanical Systems) for nanotechnological applications.