C5+ ion irradiated ZnSe optical waveguide operating from near-infrared to mid-infrared wavelength band

Abstract

We have manufactured an optical ridge waveguide in ZnSe crystal utilizing techniques of C5+ ion irradiation and precise diamond blade dicing. From near-infrared to mid-infrared band, the waveguide supports single-mode transmission and the propagation losses have been reduced as low as 0.8 dB/cm (λ = 1.064 µm), 0.6 dB/cm (λ = 2.2 µm) and 0.4 dB/cm (λ = 4 µm) after a series of annealing treatments. The refractive index profile of the waveguide is reconstructed and the simulated near-field modal profile fits well with the experiment. The Raman spectrum of the waveguide and substrate indicates there is no large lattice damage after C5+ ion irradiation.