Abstract
Needs of micro drilling of ceramic and CFRP are increasing rapidly in the regions of print plate, plane, automobile, and LSI. Micro holes are drilled by micro drill of carbide and laser conventionally. However hard materials such as ceramics and composite are difficult to drill efficiently. In this study, micro drill made of single crystalline diamond (SCD) was developed to drill ceramic plate efficiently. In this experiment, micro drill of SCD was fabricated by laser and grinding, and the drillng test of binder-less tungsten carbide was done to evaluate the tool wear.
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