Abstract
The high frequency ultrasonic cleaning of 1-2MHz is indispensable in the manufacturing process such as semiconductors. However, the absolute measurement of the output sound pressure level (S.P.L.) in the cleaning device is not established currently. The structure of sound pressure probe widely used at high frequency is the piezoelectric element (PZT) bonded to a quartz rod at the end surface. In the type of the probe, the other end surface is a probe point. And, hence, the electrical output on the PZT element is greatly influenced by vibration in the side surface of the rod. Moreover, the positioning precise of the probe in the measurement has to be micrometer order.In this present, the authors propose the new measurement method of the S.P.L. for the high frequency ultrasonic cleaning machine. As the magnitude of the vibration depends on the S.P.L., the measurement of vibration velocity is to be a measurement of the S.P.L. The vibration velocity at a frequency of several MHz can be measured by Laser Doppler Vibrometer (LDV).
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