Abstract
Technologies for drying a material with a flammable solvent at a low temperature are required. It is reasonable to evaporate a flammable solvent using radiation at the absorption band of a flammable solvent and to eject the flammable vapor with a cold air. The meta material with Au/Al2O3/Au was fabricated by using an sputtering equipment, an atomic layer deposition equipment, and an electron beam lithography equipment. The reflectances of the meta material structure were measured by using an FT-IR equipment with an integral sphere. It is clarified that the emissivities of the meta material structure are larger than 0.8 at the absorption band of toluene.
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