C013 Precise Prediction of Shape Change at Convex Tip by Large-area EB Irradiation

Abstract

In large-area EB irradiation method, the convex corner tips of workpiece could be rounded with preferential material removal at the tip, which would deteriorate the shape accuracy. The shape changes of convex corner were experimentally investigated by SEM observation of the cross sections. Also, unsteady heat conduction analysis at the convex corner was done with considering the EB concentration at the tip and the electron penetration effect into the surface. The shape change estimated by the simulation of temperature distribution at the corner agreed well with the experimental one, which enable precise prediction of shape change by large-area EB irradiation.