Abstract
The CV and IV characteristics of MIS capacitors with pyrolytically deposited SiO 2 as dielectric have been studied. Two features were found to be typical: a non-equilibrium lowering of the capacitance in the inversion mode, and a break in the original IV characteristics. These effects appear after a given value of the negative voltage has been applied on the metal electrode. A qualitative treatment attributes the observed effects to the considerable conductance of the dielectric.
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