C-MEMS Based Microsupercapacitors and Microsensors

Abstract

The rapid development of miniaturized electronic devices has led to a growing need for rechargeable micro-power sources with high performances. Miniaturized micro-supercapacitors have great potential to replace batteries and electrolytic capacitors in different types of applications. Carbon microelectromechanical systems (C-MEMS) technique, in which patterned photoresist is pyrolyzed in an inert environment at a high temperature is a powerful approach to fabricate high aspect ratio carbon microelectrode arrays, which could be a promising platform for various micro-power applications. To further improve the electrochemical properties of the carbon microelectrodes, different nanomaterials could be integrated by electrostatic spray deposition (ESD). This review provides an overview of our research at FIU on micro-supercapacitors with different structural designs and active materials.