Abstract
c-axis tilted ScAlN film is attractive for resonators exciting shear wave ultrasonic. Shear mode resonators are suitable for biomarker sensing and viscosity sensing because shear mode resonators can operate without energy leakage to liquid. These sensors are well known as a QCM (Quartz Crystal Microbalance) consisting of AT-cut quartz crystal which excites shear wave ultrasonic. When the resonator is immersed in liquid, resonant frequency decreases due to the viscosity perturbation layer between the resonator and liquid interface. The rate of resonant frequency decrease depend on the mass ratio of viscosity perturbation layer and the resonator layer. Therefore, thinner high frequency resonator allows high sensitivity viscosity measurement. The maximum resonant frequency of the standard QCM plate is about 30 MHz. On the other hand, c-axis tilted ScAlN film can operates over 1 GHz. The sensitivity of the piezoelectric film sensors are much higher thanthat of the QCM sensors. In this study, we deposited shea...
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