Abstract
L 1 0 phase FePt thin films with different crystal orientation have been prepared by deposition of Fe and Pt separately from the corresponding targets using dc magnetron sputtering and in situ substrate heating. The codiffusion of the Fe and Pt atoms are attributed by the surface bombardment from high energy ions in plasma. The transformation temperature for L10 phase FePt is as low as 250°C by this technique. The crystal orientation of the obtained FePt films with L10 structure is determined by the orientation of the initial Fe layer.
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