Abstract
In this paper, a high-repetition-rate, high-peak-power burst-mode nanosecond 355 nm UV laser was demonstrated. A quasi-continuous wave (QCW) laser diode (LD) side-pumped electro-optical (EO) Q-switched burst-mode Nd: YAG laser was performed as the fundamental laser source. Under the pumping duration of 250 μs and a burst repetition rate of 100 Hz, the pulse energy of 20 kHz burst-mode UV laser reached 5.3 mJ with a single pulse energy of 1.325 mJ, pulse width of 68 ns, resulting in a peak power of 19.49 kW. The as-generated millijoule burst-mode UV laser has great potential for high-end processing of laser lift-off, annealing and slicing in display semiconductor fields.
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