Abstract
In this paper, we show how the recently plotted phase diagrams of the HLi1NbO3 and HLi1TaO3 waveguiding layers on top of a crystal of a given orientation allows to understand, and thus to control, the reverse proton exchange (RPE) process in lithium niobate and lithium tantalate crystals to make buried waveguides for extraordinary polarization modes and surface waveguides, supporting ordinary polarization modes. The relationships between ordinary and extraordinary refractive index changes for different crystalline phases in HLi1.NbO3 and HLi1TaO3 systems have been obtained. Keywords: lithium niobate, lithium tantalate, reverse proton exchange, optical waveguides
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