Abstract
Wavelength scanning interferometry (WSI) is a technique for measuring surface topography that is capable of resolving step discontinuities and does not require any mechanical movement of the apparatus or measurand, allowing measurement times to be reduced substantially in comparison to related techniques. The axial (height) resolution and measurement range in WSI depends in part on the algorithm used to evaluate the spectral interferograms. Previously reported Fourier transform based methods have a number of limitations which is in part due to the short data lengths obtained. This paper compares the performance auto-regressive model based techniques for frequency estimation in WSI. Specifically, the Burg method is compared with established Fourier transform based approaches using both simulation and experimental data taken from a WSI measurement of a step-height sample.
Highlights
Wavelength scanning interferometry (WSI) can be used as a non-contact profilometry technique that can measure surface topography without the need for the mechanical movement of either the instrument or the measurand
The Burg method is compared with established Fourier transform based approaches using both simulation and experimental data taken from a WSI measurement of a step-height sample
The authors have previously reported on a variation of WSI using an acousto-optic tuneable filter (AOTF) combined with a halogen source to implement the required wavelength scanning [5]
Summary
Commons Attribution 3.0 capable of resolving step discontinuities and does not require any mechanical movement of the licence. Any further distribution of this work must maintain related techniques. The axial (height) resolution and measurement range in WSI depends in part on attribution to the author(s) and the title of the algorithm used to evaluate the spectral interferograms. Reported Fourier transform the work, journal citation based methods have a number of limitations which is in part due to the short data lengths obtained. This paper compares the performance auto-regressive model based techniques for frequency estimation in WSI. The Burg method is compared with established Fourier transform based approaches using both simulation and experimental data taken from a WSI measurement of a step-height sample
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