Abstract
In this paper, we measured bulk modulus of microfluidics using bulk acoustic wave (BAW) MEMS sensors. The 2.5 GHz resonant sensor interacted with fluids by longitudinal bulk acoustic waves. Measurement experiments were carried out on 1 pL glycerol-water sample droplets, and the results were compared with theoretical models. We showed that the longitudinal acoustic wave sensors are sensitive to bulk modulus of microfluidics (sensitivity of 12.42 MHzm2N−1). We also validated that the sensors are insensitive to viscosity, which is another important liquid property usually measured by shear acoustic wave sensors.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.