Abstract

The rapidly advancing technology of the electronic industry has gone beyond the state of the art of Building Designer. Smaller and smaller geometries in the semiconductor field have necessitated more and more high‐powered magnifications. At present, telescopes with magnifications of 500 to 600 are standard practice. Operators of telescopic equipment working at this magnification are required to align geometries, and vibrations must be kept to a level which will not be noticeable so as to disturb the operators. In as much as it is impossible to remove all vibration that can be caused by such sources as traffic, building mechanical equipment, elevators, footfalls, manufacturing equipment, etc., it has become necessary to attempt to develop maximum amplitudes of structural motion that will still allow good operating conditions.

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