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Abstract
Some recent measurements of gas bubbles on the grain boundaries in chemically vapor deposited (CVD) tungsten after various annealing treatments are analyzed in terms of three existing models of bubble growth in solids. The bubbles had average diameters in the range 0.08 to 5.6 μm. For these bubbles, growth by bodily migration and coalescence is shown to be highly improbable for the annealing times involved. The general pattern of the experimentally observed bubble growth can be most closely described by a model involving bubble dissolution and reprecipitation. This growth is characterized by an activation energy of approximately 92 kcal/g-atom, which is close to that for self-diffusion of tungsten in the grain boundaries. At high annealing temperatures bubble growth is enhanced by overlapping or in situ coalescence.
Published Version
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