Abstract

A micro heater array has been fabricated using a standard micromachining technique to study the micro thermal bubble dynamics on a horizontal downward-facing surface. Several different types of bubble dynamic phenomena, such as bubble sweeping, bubble departure/retraction and multibubbles interaction/coalescence, have been investigated utilizing a high-speed photography system. The effects of Marangoni force, buoyancy force and drag force on the bubble dynamic phenomena have been studied utilizing experimental data. The results obtained from this study are not only helpful for understanding the microscale thermal bubble dynamics but also useful for optimization of micro cooling equipment and development of novel thermal bubble-based MEMS (micro-electro-mechanical-system) devices.

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