Abstract

In this paper, Au/Ba0.6Sr0.4TiO3 (BST) ferroelectric thin-film interdigital capacitors on MgO substrate are presented. The interdigital capacitors with a 50-μm gap and different doped materials of BST thin film are characterized. Tunability rates of 11.2% and 28% are obtained for the undoped BST thin film and the Mn-doped (3 mol %) BST thin film, respectively, at 3.5 GHz with a bias voltage of 20 V. Furthermore, the loss tangent of the BST thin film is found to be approximately 0.0158 and it decreases with Mn doping. Mn-doped (3 mol %) BST film is suggested to be an effective candidate for high-performance tunable device applications. © 2005 Wiley Periodicals, Inc. Microwave Opt Technol Lett 45: 15–18, 2005; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.20709

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