BSCAT-code for simulation and for analysis of the RBS/NRA spectra

Abstract

In last years the beam of charged particles is frequently used for nondestructive investigations of thin surface layers. The nuclear methods such as RBS (Rutherford BackScattering Spectroscopy) and the NRA (Nuclear Reaction Analysis) have depth and mass resolution good enough for studies of the elemental composition and the structures of solid materials. To analyze and to simulate of the results collected in RBS/NRA type measurements many computer programs were created, for example RUMP[1] or DVBS[2]. Another group of the nuclear methods, called generally as PIXE (Particle Induced X-ray Emission) or PIGE (Particle Induced Gamma-ray Emission) have very good lower detection limit for determination of the concentration of elements. Unfortunately the simple PIXE/PIGE technique can not be used for determination of the depth distribution of elements in target. Fortunately the simultaneous detection of backscattered particles and X-rays can be more effective way for investigations of the composition and the structure of thin surface layers. The BSCAT code was created for determination of solid material structures and for determination of the depth distribution of elements by using of the RBS/NRA and the PIXE/PIGE techniques. The BSCAT code can be used for simulation and for analysis of the experimental spectrum of particles backscattered on multielemental and multilayer samples. The first version of the BSCAT code was used initially for investigation of the thin carbon coatings on the Si single crystal and was presented on the ECCART’95[3] conference. Recently BSCAT program was rebuilt and now can perform simulation and analysis of the RBS/NRA and simple PIXE spectra.