Abstract
A broadband dual-mode 2×23dB power splitter on silicon is proposed by utilizing multimode interference (MMI) couplers with a shallowly etched multimode region. The present MMI coupler is designed optimally to be with reduced phase errors for all the excited higher-order modes in the MMI region by engineering the refractive-index profile with the assistance of a shallowly etched multimode region. Simulation results show the device works well for the TE0 and TE1 input modes over the C-band. For the TE0 input mode, the excess losses (ELs) and the imbalances (IBs) are, respectively, less than 0.4 and 0.12 dB in the wavelength range of 1.5-1.6 µm, while the ELs and the IBs for the TE1 input mode are, respectively, less than 0.5 and 0.2 dB in the wavelength range of 1.53-1.58 µm. Besides, the intermode cross-talk is less than -22dB for TE0 and TE1 modes in the wavelength range of 1.5-1.6 µm. The proposed dual-mode MMI coupler can be extended for more than two input modes.
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