Abstract
This work describes a new type of sensor for growth process monitoring named broadband cavity-enhanced optical flux monitoring sensor (BBCE-OFM). Like existing optical flux monitoring (OFM) solutions, it relies on absorption spectroscopy. However, the implementation of an optical cavity reduces the measurement uncertainty, enabling efficient operation even at very low growth rates. Using the BBCE-OFM sensor mounted in our solid-source oxide molecular beam epitaxy reactor, we achieved an uncertainty of ±2% on the measurement of Sr and Ti growth rates in SrTiO3 at around 1 Ml/min, to be compared to the ±16% obtained in the same conditions using a conventional OFM setup. Furthermore, our sensor architecture, based on an echelle monochromator and LEDs replacing the hollow cathode lamps used in standard OFM sensors, is more robust against drift.
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