Abstract
Abstract A theoretical study is made on thermoelastic stress arising during interaction of a low-energy ion with a solid. The conditions are formulated that are necessary and sufficient for the brittle fracture and cluster sputtering of the material to occur. The sputtering coefficient is determined depending on the ion species and energy and the characteristics of material.
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Schedule a callMore From: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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