Abstract
Some of the benefits and pitfalls of electron and photon stimulated desorption (ESD/PSD) processes at surfaces are described. The benefits include useful information about the local structure of surface molecules, provided by electron stimulated desorption ion angular distributions (ESDIAD), ESDIAD is an effective surface structural tool because the directions of ion desorption are determined by the orientation of the surface bonds ruptured by electron or photon bombardment. Other benefits of electron and photon-stimulated damage processes at surfaces include electron and photon beam lithography in microelectronics. The pitfalls of ESD/PSD include beam damage in surface analysis (by Auger electron spectroscopy, X-ray photoelectron spectroscopy and high resolution transmission electron microscopy), the PSD of gases from vacuum walls in fusion reactors and synchrotron radiation sources, and inaccurate pressure readings due to ESD effects in ionization gauges.
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