Abstract
AbstractPorous silicon films and multilayers were studied using Brillouin spectroscopy. Acoustic wave velocities and elastic constants were determined for films with porosity ∼0.60 formed from p–, p+ and n+ crystalline silicon. The velocities and elastic constants depend on the pore/crystallite geometry and morphology. Porous silicon multilayers were fabricated from (100) p+ crystalline silicon. For a multilayer with 250 nm layer thickness and layer porosity sequence of 0.45/0.65/0.45/0.65/0.45, the Rayleigh surface phonon velocity was found to be 2850 m/s. The origin(s) of other peaks in the multilayer spectra are unknown but it is unlikely that they are surface modes because their shift(s) are independent of incident angle. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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