Abstract

X-ray excited Auger spectroscopy is valuable for line shape analysis because of its high energy resolution and low background. High energy (≳1500 eV) Auger spectra are often inaccessible to photo excitation by characteristic radiation as opposed to white radiation or bremsstrahlung. We show that the bremsstrahlung and Al–Kα excited L3M45M45 Auger spectra of copper are the same. We demonstrate the utility of using bremsstrahlung by discussing the fine structure of bremsstrahlung excited M5N67N67 and M45N45N66 Auger spectra of gold.

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