Abstract
We report the results of a combined experimental and modeling study of the electrical breakdown of hydrogen and deuterium in static (DC) and radio-frequency (RF) (13.56 MHz) electric fields. For the simulations of the breakdown events, simplified models are used and only electrons are traced by Monte Carlo simulation. The experimental DC Paschen curve of hydrogen is used for the determination of the effective secondary electron emission coefficient. A very good agreement between the experimental and the calculated RF breakdown characteristics for hydrogen is found. For deuterium, on the other hand, presently available cross section sets do not allow a reproduction of RF breakdown characteristics.
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