Abstract
Measured breakdown characteristics of a capacitively coupled rf argon discharge at 13.56 MHz are compared with breakdown criterion derived from the electron balance model in which the difference between the longitudinal and transverse electron diffusion coefficients is taken into account. For the right-hand branch of the minimum of V-shaped breakdown voltage curves, good agreement between the observed and predicted criteria is found in the case of short electrode separations when the electron formation rate is calculated in terms of the time-averaged ionization frequency.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
