Abstract

Ion range is one of the most important considerations in describing ion-solid interactions. When an energetic ion penetrates a solid, it undergoes electronic and nuclear stopping in the target. In the beginning of the slowing-down process at high energies, the ion is slowed down mainly by electronic stopping, and it moves almost in a straight path. As the ion energy decreases, the probability of collisions with nuclei increases, and the nuclear stopping finally dominates the slowing-down process. During the collision processes, target atoms (target recoils), which receive significant recoiling energies from the ion, will be removed from their lattice positions and produce a cascade of further collisions in the target.

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