Abstract
We study the elastic properties of dilute Ga(As,N) thin films grown on GaAs(001) by means of nano-indentation and complementary dynamic finite element calculations. The experimental results of indentation modulus are compared with simulations in order to extract the cubic elastic constants cij as a function of nitrogen content of the Ga(As,N) alloys. Both, indentation modulus and elastic constants decrease with increasing nitrogen content, which proves a strong negative bowing effect in this system in contrast to Vegard's law.
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